2. The FPD lithography system patterns* thin film transistor (TFT) onto a glass plate

  • *Expose circuit patterns on a plate.
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Regarding 4K (UHD: Ultra High Definition) displays, which have more than 8 million pixels, the number of TFTs necessary to control those pixels for red, green, and blue is more than 24 million (8 million x three colors) in an LCD, and several times more in an OLED. High-definition images are projected by precisely controlling each of these TFTs. The FPD lithography system patterns precise TFTs onto a glass plate.

The FPD lithography system irradiates light onto a photomask on which the original TFT circuit patterns are drawn, and the light exposes the patterns onto the glass plate through a lens. On a large glass plate, the exposure process is repeated several times in order to form the patterns onto the entire plate.

The Nikon FPD lithography system uses the multi-lens scanning method to achieve superior accuracy and productivity.

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