Launch of industrial lenses Rayfact RF3-6x variable magnification lens and Rayfact RF3-6x prism-type variable magnification lens for industrial cameras
Ideal for visual inspection of semiconductor package substrates and electronic components as they continue to advance in miniaturization and high integration
January 15, 2025
Nikon Corporation is pleased to announce the release of the industrial lenses `Rayfact RF3-6x variable magnification lens` and `Rayfact RF3-6x prism-type variable magnification lens`. Part of the Rayfact RF series, these industrial lenses are fully compatible with high-resolution line scan cameras*1 and large area scan cameras,*2 making them an ideal choice for inspecting microscopic patterns on semiconductor wafers and flat panel displays (FPD) substrates.
The Rayfact RF3-6x variable magnification lens and Rayfact RF3-6x prism-type variable magnification lens are specifically designed for high-precision visual inspection of microscopic patterns on next-generation semiconductor packages and micro-LED panels. These lenses deliver enhanced resolution and sharper image compared to previous models, ensuring superior performance in detecting microscopic defects. Furthermore, the Rayfact RF3-6x prism-type variable magnification lens features an optical systems optimized for incident illumination, tailored to meet the demands of various inspection applications and environments.
These lenses will be exhibited at the 39th Nepcon Japan taking place at Tokyo Big Sight from January 22nd to 24th, 2025.
- *1Inspection camera with a single row of photosensitive sensors to capture images by scanning the entire inspection target one line at a time.
- *2Inspection camera with photosensitive sensors arranged like a grid over a surface to capture an image of a specific area at a time.
New Product Overview
| Product name | Rayfact RF3-6x variable magnification lens Rayfact RF3-6x prism-type variable magnification lens |
|---|---|
| Order start date | February 1, 2025 |
Main Features
- Variable 3- 6x magnification range in a single lens
- Consistent performance with minimal variation across the entire magnification range
- Designed with optics that maximize the performance of high-resolution large line sensor cameras* with an 82mm image circle
- Bright and clear imaging at F1.8
- Includes an optically optimized model designed for placing prisms on the object side (Coaxial illumination: 30mm thickness)
- Equipped with gears on the aperture ring and floating ring, allowing external control of the aperture and floating mechanisms
- *Compatible large-size line sensors: 3.5µx23K / 5µx16K
Main Specifications
Basic Specifications
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| Model | BA01941/BA01951 (prism type) |
|---|---|
| Operating magnification range | -3 - -6x |
| F Number (∞) | F1.8 - F11 |
| Wavelength range (nm) | 400 - 700 |
| Image size (mm) | Φ82 |
| Mount | M67 (P=0.75) external screw |
| Diameter/length (mm)*1, *2 | Φ110 x 166.1 |
| Weight (g)*1 | Approx. 2,450 |
Optical Specifications
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| Magnification | -3x | -3.5x | -5x | -6x |
|---|---|---|---|---|
| Focal length (mm)*1 | 108.9 | 108.4 | 107.5 | 107.1 |
| NA*1 | 0.208 | 0.214 | 0.226 | 0.231 |
| Object-to-image distance (mm)*1 | 593.3 | 640.1 | 787.3 | 888.3 |
| Working distance (mm)*1 | 93.3 | 88.3 | 79.4 | 75.5 |
| Distortion (%)*1, *3 | ≦ 0.07 | |||
| Relative illumination (%)*1, *3 | ≧ 90 | |||
| Object size (mm) | 27.3 | 23.4 | 16.4 | 13.7 |
- *1 Specifications for the Rayfact RF3-6x prism-type variable magnification lens
- *2Excludes the lock screw and mounting screw.
- *3Measured at the maximum image height (Y'=41.0 mm) and F1.8.
The information is current as of the date of publication. It is subject to change without notice.