Nikon introduces the next generation of Video Measuring Systems: “NEXIV VMF-K” Series
Fast and accurate two-dimensional and height measurements
December 5, 2024
TOKYO - Nikon Corporation (Nikon) is pleased to announce the release of the Video Measuring System “NEXIV VMF-K” series. This system can automatically measure the dimensions of electronic components, including semiconductor devices.
The “NEXIV VMF-K” series features a confocal optical system that can measure not only the two-dimensional but also the height of an object. The improved speed in measuring the height, results in a throughput that is approximately 1.5 times faster* than the previous model “NEXIV VMZ-K” series.
- *Based on measurement conditions specified by Nikon.
Product Information
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| Product Name | Video Measuring System “NEXIV VMF-K3040”, “NEXIV VMF-K6555” |
|---|---|
| Order start date | December 2024 |
Product Development Background
As semiconductors become smaller and more integrated, inspection processes are increasingly crucial for quality maintenance. The NEXIV VMF-K Series addresses this challenge by providing stable measurements of micron-level dimensions while significantly improving throughput. Thereby supporting stringent quality control in semiconductor device manufacturing.
Key Features
1. Enhanced measurement throughput
The VMF-K Series achieves 1.5 times higher measurement throughput compared to the previous models by revising the mechanical design of the optical system for faster height measurement. This significantly reduces measurement time and contributes to the efficient quality control processes in the production of semiconductors and electronic devices.
2. Expanded magnification of 45x model
In addition to the conventional 30x magnification, we have added a higher magnification model of 45x to our lineup. This supports the demands to measure line widths of 2 µm or less in advanced semiconductor packaging.
3. Other features
- Longer-lasting LED confocal light source
- Compliant with SEMI S2/S8 safety standards for semiconductor manufacturing equipment
- Display now shows remaining measurement time
- New black and silver exterior based on factory design
Main Specifications
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| Model number | VMF-K3040 | VMF-K6555 |
|---|---|---|
| Stroke (X x Y x Z) |
300x400x150 mm | 650x550x150 mm |
| Accuracy guaranteed loading capacity | 20 kg | 30 kg |
| Maximum permissible error (L: length in mm) | EUX, MPE EUY, MPE ±(1.2 + 4L/1000) µm EUXY, MPE ±(2.0 + 4L/1000) µm EUZ, MPE ±(1 + L/1000) µm |
|
| Optical Magnification | 1.5x/3.0x/7.5x/15x/30x/45x | |
| Field of view (confocal optics) |
1.5x: 7.80x5.82 mm 3.0x: 3.90x2.91 mm 7.5x: 1.56x1.17 mm 15x: 0.78x0.58 mm 30x: 0.39x0.29 mm 45x: 0.26x0.19 mm |
|
| Field of view*1 (bright field optics) |
1.5x: 7.80x5.85~0.52x0.39 mm 3.0x: 3.90x2.92~0.26x0.19 mm 7.5x: 1.56x1.17~0.10x0.078 mm 15x: 1.26x0.95~0.099x0.074 mm 30x: 0.63x0.47~0.052x0.039 mm 45x: 0.63x0.47~0.052x0.039 mm |
|
| Autofocus (bright field optics) |
TTL laser AF/Image AF |
|
| Illumination (bright field optics) |
1.5x/3.0x/7.5x/15x: Diascopic, coaxial episcopic and ring 30x/45x: Diascopic and coaxial episcopic |
|
| Power source and power consumption | AC 100V-240V ±10%, 50/60Hz / 13A-10A | |
| Main body dimensions (W x D x H) and weight | 1146x1247x1973 mm / approx. 800 kg | 1198x1640x1973 mm / approx. 800 kg |
| Controller dimensions (W x D x H) and weight | 190x450x440 mm / approx. 14 kg | |
| Recommended installation dimensions (W x D) *2 | 3150x3000 mm | 3200x3300 mm |
| Minimum installation dimensions (W x D) | 2500x1600 mm | 2500x1900 mm |
- *1Motorized 5-step zoom.
- *2Includes our recommended maintenance space.
The information contained in this press release is current as of the date of announcement.