Nikon Introduces New Confocal NEXIV, VMZ-K6555

March 23, 2009

Nikon Corporation (Michio Kariya, President) is pleased to announce the launch of the new Confocal NEXIV VMZ-K6555. The new Confocal NEXIV VMZ-K6555 is designed for faster and more accurate non-contact 3D measurements on larger size substrates, probe cards, and other applications requiring large stage travel. Higher magnification optics is incorporated in the design of the new Confocal NEXIV VMZ-K6555.

Product Information

Product name	Confocal NEXIV, VMZ-K6555
Start receiving orders from	March 30, 2009

Product Concept

The new Confocal NEXIV VMZ-K6555 has been designed with longer XY travel (650x550 mm) to cover the non contact 3D measurement requirements of larger substrates such as recent cutting-edge interposer substrates, and probe cards with greater accuracy and faster measurement speed. In addition, the new Confocal NEXIV VMZ-K6555 optical head employing the newly designed higher magnification objective lens (30x) can be configured for better resolution power along the XY plane.

Similar to the current Confocal NEXIV VMR-K3040ZC, the new Confocal NEXIV VMZ-K6555 continues to allow for both 2D measurements on brightfield images with a CNC 15x zooming optics and 3D measurements on confocal images. Furthermore, TTL scanning laser automatic focus and Video image automatic focus functionalities have been added to the new Confocal NEXIV VMZ-K6555 for more flexibility.

For faster measurement speed, the standard confocal optics using lower magnifications such as 1.5x, 3x and 7.5x has been redesigned and employed. The system can be configured either with built-in high magnification CF optical head or with built-in standard magnification CF optical head so that it can be optimized for broad variations of complicated and smaller measuring targets on any measuring application.

Features

1. Longer XY stage strokes

650x550 mm strokes are realized for the inspection of 510 mm square interposer substrates or 500 mm diameter probe cards or any application requiring large XY stage travel.

2. High magnification lens 30x and high magnification CF optical head (Type H)

The dedicated 30x objective lens and high magnification CF optical head have been newly designed to produce higher resolution for the measurements of smaller line width and spacing.

3. Optional standard CF optical head (Type S)

Dedicated objective lenses such as 1.5x, 3x and 7.5x are used with a wider field of view for the standard CF optical head for faster measurement speed.

4. TTL scanning laser AF and vision AF now available on the VMZ-K6555

The renowned NEXIV automatic focusing capabilities have now been added to the new Confocal NEXIV VMZ-K6555 for the ability to easily accomplish much more complex measuring applications.

5. Higher resolution power and higher traveling accuracy on the Z axis

Z axis travel resolution is now 0.01 µm and traveling accuracy on the Z axis is now 1+L/150 µm1+L/1000 µm, regardless of the type of confocal optical head.
(Revised on March 24, 2009)

6. LED light source

For episcopic and diascopic lighting, the halogen light source has been replaced with LED light allowing for longer life and brighter images.

Specifications

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Model	VMZ-K6555
Head Type	Type H	Type S
Magnifications	30x	7.5x	3x	1.5x
W.D.	5 mm	5 mm	24 mm	24 mm
Confocal Optics for Area Height Measurement
Maximum scanning range	1 mm	1 mm	1 mm	1 mm
Field of view	0.4x0.3 mm	1.6x1.2 mm	4x3 mm	8x6 mm
Z measurement repeatability (2σ)	0.2 µm	0.25 µm	0.35 µm	0.6 µm
Z axis minimum read out	0.01 µm
Height measurement speed	1.5 sec./FOV
Brightfield Optics for 2D Measurement
Zooming method	Motorized 5-step zoom (1-15x)
Field of view	0.39x 0.3-0.049x 0.037 mm	1.6x 1.2-0.11x 0.08 mm	4x3-0.27x 0.2 mm	8x6-0.53x 0.4 mm
Illumination	Dia/Epi	Dia/Epi/Ring Light
Light source	White LED
Auto focus	TTL Laser AF/Vision AF
Main Body
Stroke (X x Y x Z)	650x550x150 mm
Guaranteed loading capacity	30 kg
XY traveling accuracy U1X/Y	1.5+2.5L/1000 µm
U2XY	2.5+2.5L/1000 µm
Z axis	(begin delete)~~1+L/150 µm~~(end delete) 1+L/1000 µm^*
Main unit weight	(begin delete)~~Approx. 800 kg~~(end delete) Approx. 850 kg^*
Power source/ consumption	AC 100-240 V ± 10 % 50/60 Hz / 10 A - 5 A
Operating conditions	Temperature: 20 °C ± 0.5 K Humidity: 70 % or less
Acquired standard	CE marking (low voltage/EMC/Laser)

*Revised on March 24, 2009