Products archive
FPD Scanners
FX-101S
Performance
Swipe horizontally to view full table.
| Resolution (L/S) (switchable) | 3.5 µm (g+h+i-line), 3.0 µm (i-line) (option) |
|---|---|
| Projection magnification | 1:1 |
| Overlay | ≦ ±0.6 µm |
| Plate size | 2,880 mm × 3,130 mm |
| Takt time | 70 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-86SH2/86S2
Performance
Swipe horizontally to view full table.
| FX-86SH2 | FX-86S2 | |
|---|---|---|
| Resolution (L/S) | 2.2 µm (g+h+i-line) | 3.0 µm (g+h+i-line) |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.5 µm | |
| Plate size | 2,200 mm × 2,500 mm | |
| Takt time | 49 s/plate Conditions: 2,200 mm × 2,500 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
|
FX-76S/86S
Performance
Swipe horizontally to view full table.
| FX-76S | FX-86S | |
|---|---|---|
| Resolution (L/S) | 3.0 µm (g+h+i-line) | |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.6 µm | |
| Maximum plate size | 1,950 mm × 2,250 mm | 2,200 mm × 2,500 mm |
| Takt time | 56 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
58 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-75S/85S
Performance
Swipe horizontally to view full table.
| FX-75S | FX-85S | |
|---|---|---|
| Resolution (L/S) | 3.5 µm (g+h+i-line) | |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.6 µm | |
| Maximum plate size | 1,950 mm × 2,250 mm | 2,200 mm × 2,500 mm |
| Takt time | 58 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
60 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-73S/83S
Performance
Swipe horizontally to view full table.
| FX-73S | FX-83S | |
|---|---|---|
| Resolution (L/S) (switchable) | 3.5 µm (g+h+i-line), 3 µm (i-line) (option) | |
| Projection magnification | 1:1 | |
| Overlay | ≦ 0.6 µm | |
| Maximum plate size | 1,950 × 2,250 mm | 2,200 × 2,500 mm |
| Takt time | 68 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
72 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-71S/81S
Performance
Swipe horizontally to view full table.
| FX-71S | FX-81S | |
|---|---|---|
| Resolution (L/S) (switchable) | ≦ 3.5 µm (g+h+i-line), 3 µm (i-line) (option) | |
| Projection magnification | 1:1 | |
| Overlay | ≦ 0.6 µm | |
| Maximum plate size | 1,950 × 2,250 mm | 2,200 × 2,500 mm |
| Takt time | 74 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
75 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-67S2/67S
Performance
Swipe horizontally to view full table.
| FX-67S2 | FX-67S | |
|---|---|---|
| Resolution (L/S) | 2.0 µm (g+h+i-line) | |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.5 µm | |
| Plate size | 1,500 mm × 1,850 mm | |
| Takt time | 57 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
61 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-66S2/66S
Performance
Swipe horizontally to view full table.
| FX-66S2 | FX-66S | |
|---|---|---|
| Resolution (L/S) | 3.0 µm (g+h+i-line) | |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.6 µm | |
| Plate size | 1,500 mm × 1,850 mm | |
| Takt time | 53 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
55 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-55S/65S
Performance
Swipe horizontally to view full table.
| FX-55S | FX-65S | |
|---|---|---|
| Resolution (L/S) (switchable) | ≦ 3 µm (i-line), ≦ 3.5 µm (g+h+i-line) | |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.6 µm (3σ) | |
| Maximum plate size | 1,300 × 1,300 mm | 1,500 × 1,850 mm |
| Takt time | 59 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
67 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-53S/63S
Performance
Swipe horizontally to view full table.
| FX-53S | FX-63S | |
|---|---|---|
| Resolution (L/S) (switchable) | ≦ 3 µm (i-line), ≦ 3.5 µm (g+h+i-line) | |
| Projection magnification | 1:1 | |
| Overlay | ≦ 0.6 µm | |
| Maximum plate size | 1,300 × 1,300 mm | 1,500 × 1,850 mm |
| Takt time | 67 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
73 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-21S/22S
Performance
Swipe horizontally to view full table.
| FX-21S | FX-22S | |
|---|---|---|
| Resolution | ≦ 2.4 µm (isolated pattern), ≦ 3 µm (L/S) | |
| Projection magnification | 1:1 | |
| Exposure field | 400 × 700 mm | 400 × 714 mm |
| Overlay | ≦ 0.6 µm (3σ) | |
| Maximum plate size | 800 × 950 mm | 920 × 920 mm |
FPD Steppers
FX-903N
Performance
Swipe horizontally to view full table.
| Resolution (L/S) | 1.5 μm |
|---|---|
| Exposure field | 132 mm square |
| Exposure wavelength | i-line (365 nm wavelength) |
| Projection magnification | 1:1.25 |
| Overlay | ≦ ±0.30 μm (3σ) |
| Maximum plate size | 730 × 920 mm |
| Reticle size | 6-in. (0.25-in. thickness) |
| Takt time (30 shots) | 65 seconds (50 mJ/cm2) |
FX-803M
Performance
Swipe horizontally to view full table.
| Resolution (L/S) | 3.0 μm |
|---|---|
| Exposure field | 132 mm square |
| Exposure wavelength | g+h-line |
| Projection magnification | 1:1.25 |
| Overlay | ≦ ±0.38 μm (3σ) |
| Maximum plate size | 730 × 920 mm |
| Reticle size | 6-in (0.25-in. thickness) |
| Takt time (30 shots) | 65 seconds (40 mJ/cm2) |
FX-801M
Performance
Swipe horizontally to view full table.
| Resolution | ≦ 3 µm (L/S) |
|---|---|
| Projection magnification | 1:1.25 |
| Exposure field | 132 mm square |
| Overlay | ≦ 0.4 µm (3σ) |
| Maximum plate size | 730 × 920 mm |
| Reticle size | 6-in. (0.25-in. thickness) |
| Takt time | 89 sec./plate (42 shots) (30 mJ/cm2) |
FX-702J
Performance
Swipe horizontally to view full table.
| Resolution | ≦ 1.5 µm (L/S), ≦ 2.0 µm (C/H) |
|---|---|
| Projection magnification | 1:1 |
| Exposure field | 100 mm square to 74.83 x 120 mm (≦ ø141.42 mm) |
| Reticle size | 6-in. (0.25-in. thickness) |
| Maximum plate size | 600 (X) × 720 (Y) mm |
| Overlay | ≦ 0.32 µm (8-point + EGA, |M| + 3σ) |
| Options | Pellicle particle detector, extended reticle library, reticle bar code reader, remote control system (RCS) |
FX-701M
Performance
Swipe horizontally to view full table.
| Resolution | 2.4 µm (isolated pattern), 3 µm (L/S) |
|---|---|
| Projection magnification | 1:1.25 |
| Exposure field | 132 mm square to 105.87 (H) × 153.75 (V) mm (≦ ø186.68 mm) |
| Reticle size | 6-in. (0.25-in. thickness) |
| Maximum plate size | 600 (X) × 720 (Y) mm |
| Overlay | 0.5 µm (|M| + 3σ, EGA) |
| Options | Pellicle particle detector, extended reticle library, six-reticle multichanger, bar-code reader, plate edge exposure function, etc. |
FX-601F
Performance
Swipe horizontally to view full table.
| Resolution | ≦ 2.4 µm (isolated pattern), ≦ 3 µm (L/S) |
|---|---|
| Projection magnification | 1:1.25 |
| Exposure field | 120 mm square to 98.78 (H) × 138 (V) mm (≦ ø169.71 mm) |
| Reticle size | 6-in. (0.25-in. thickness) |
| Maximum plate size | 550 × 650 mm |
| Overlay | ≦ 0.5 µm (EGA, |M| + 3σ) |