Lineup
Flat panel displays render images with breathtaking sharpness. The Nikon lineup includes models that support the world's largest plate size, bolstering the global manufacturing of crystalline displays.
FX-103SH/103S
Performance
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| FX-103SH | FX-103S | |
|---|---|---|
| Resolution (L/S) | 2.2 µm (g+h+i-line) | 3.0 µm (g+h+i-line) |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.5 µm | |
| Plate size | 2,940 mm × 3,370 mm | |
| Takt time | 60 s/plate Conditions: 2,940 mm × 3,370 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
|
FX-88S
Performance
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| Resolution (L/S) | 1.5 µm (i-line) |
|---|---|
| Projection magnification | 1:1 |
| Overlay | ≦ ±0.40 µm |
| Plate size | 2,200 mm × 2,500 mm |
| Takt time | 47 s/plate Conditions: 2,200 mm × 2,500 mm, 4 scans, i-line, 30 mJ/cm2 |
FX-6AS
Performance
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| Resolution (L/S) | 1.0 µm*1 (i-line) |
|---|---|
| Projection magnification | 1:1 |
| Overlay | ≦ ±0.23 µm |
| Plate size | 1,500 mm × 1,850 mm |
| Takt time | 42 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, i-line, 30 mJ/cm2 |
- *1When using a phase shift mask
FX-68SH/68S
Performance
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| FX-68SH | FX-68S | |
|---|---|---|
| Resolution (L/S) | 1.2 µm*1 (i-line) | 1.5 µm (i-line) |
| Projection magnification | 1:1 | |
| Overlay | ≦ ±0.27 µm | |
| Plate size | 1,500 mm × 1,850 mm | |
| Takt time | 42 s/plate Conditions: 1,500 mm × 1,850 mm, 4 scans, i-line, 30 mJ/cm2 |
|
- *1When using a phase shift mask
All of the products on this page are under export restriction. The export of these products is controlled by Japanese Foreign Exchange and Foreign Trade Law and International export control regimes. They shall not be exported without authorization from the appropriate governmental authorities.