|
| NSR-S204B |
| Resolution |
150nm or better |
| NA |
0.68 |
| Exposure light source |
KrF excimer laser (248nm) |
| Reduction ratio |
1:4 |
| Exposure field |
25×33mm |
Alignment accuracy (EGA,  )
|
35nm or better (FIA, LIA) |
|
| |
|
| NSR-S203B |
| Resolution |
180nm or better |
| NA |
0.68 |
| Exposure light source |
KrF excimer laser (248nm) |
| Reduction ratio |
1:4 |
| Exposure field |
25×33mm |
Alignment accuracy (EGA, )
|
40nm or better (FIA, LIA) |
|
| |
|
| NSR-S202A |
| Resolution |
250nm or better |
| NA |
0.60 |
| Exposure light source |
KrF excimer laser (248nm) |
| Reduction ratio |
1:4 |
| Exposure field |
25×33mm |
Alignment accuracy (EGA, )
|
45nm or better (FIA, LIA) |
|
| |
| NSR-2205EX14C |
| Resolution |
250nm or better |
| NA |
0.60 |
| Exposure light source |
KrF excimer laser (248nm) |
| Reduction ratio |
1:5 |
| Exposure field |
22mm square to 17.9(H) x 25.2(V)mm |
Alignment accuracy (EGA, )
|
50nm or better |
| Alignment system |
LSA (standard), FIA (standard), LIA (optional) |
|
| |
|
| NSR-2205EX12B |
| Resolution |
280nm or better |
| NA |
0.55 |
| Exposure light source |
KrF excimer laser (248nm) |
| Reduction ratio |
1:5 |
| Exposure field |
22mm square to 17.9(H) x 25.2(V)mm |
Alignment accuracy (EGA, )
|
55nm or better |
| Alignment system |
LSA (standard), FIA (standard), LIA (optional) |
|
| |
|
| NSR-S201A |
| Resolution |
250nm or better |
| NA |
0.60 |
| Exposure light source |
KrF excimer laser (248nm) |
| Reduction ratio |
1:4 |
| Exposure field |
25×33mm |
Alignment accuracy (EGA, )
|
50nm or better |
|
| |
|
| NSR-2205EX10B |
| Resolution |
320nm |
| Exposure light source |
KrF excimer laser (248nm) |
| Reduction ratio |
1:5 |
| Exposure field |
22mm square to 17.9(H) x 25.2(V)mm |
Alignment accuracy (EGA, )
|
80nm or better |
|
