| Designed for the mass production of 110nm devices, the NSR-S207D is a cutting-edge, KrF scanner. It incorporates an ultra-high NA (0.82) projection lens, and a 248nm-wavelength KrF excimer laser. The NSR-S207D’s newly developed body enables greater throughput and more precise alignment. |
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| Resolution |
110nm or better |
| NA |
0.82 |
| Exposure light source |
KrF excimer laser (248nm wavelength) |
| Reduction ratio |
1:4 |
| Exposure field |
26×33mm |
Alignment accuracy
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10nm or better  |
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Leaflet (279KB)