| The NSR-S206D, a KrF scanner, incorporates an ultra-high NA (0.82) projection lens and a 248nm-wavelength KrF excimer laser. The system has been designed for application in the mass production of advanced devices with design rules of 110nm or better. |
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| Resolution |
110nm or better |
| NA |
0.82 |
| Exposure light source |
KrF excimer laser (248nm wavelength) |
| Reduction ratio |
1:4 |
| Exposure field |
25 x 33mm |
Alignment accuracy
|
20nm or better  |
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Leaflet (252KB)