The NSR-2205i14E2 with a projection lens offers a peak NA of 0.63 and achieves a resolution of 0.35µm or better. Through modified illumination, it allows optimization of various processing conditions for 256M DRAM mass production.
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| Resolution |
350nm or better |
| NA |
0.63 |
| Exposure light source |
i-line (365nm) |
| Reduction ratio |
1:5 |
| Exposure field |
22mm square to 17.9 (H) x 25.2 (V)mm |
Alignment accuracy 
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40nm or better |
| Throughput |
LSA (standard), FIA (standard), LIA (optional) |
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Leaflet (239KB)