The NSR-2205i12D i-line stepper for 5-/6-inch reticle size with projection lens offers a peak NA of 0.63 and achieves a resolution of 350nm or better. The improved illumination system makes it possible to use the modified illumination for mass production. NA is variable over a range from 0.5 to 0.63, allowing optimization for the actual processing conditions.
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| Resolution |
350nm or better |
| NA |
0.63 |
| Exposure light source |
i-line (365nm) |
| Reduction ratio |
1:5 |
| Exposure field |
22mm square to 17.9 (H) x 25.2 (V)mm (6-inch reticle), 20.0 x 20.4mm (5-inch reticle) |
Alignment accuracy 
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55nm or better (LSA) |
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