The FX-75S/85S exposure systems for liquid crystal displays support 7th and 8th generation plate sizes and increase productivity by 17-20 percent compared to previous models.
To boost the productivity of large LCD panels—increasingly used in TVs and other products—Nikon has achieved much higher throughput with the FX-75S/85S systems by improving every function. Based on Nikon’s renowned optical technologies that ensure high productivity, the FX-75S/85S systems enable the most efficient mass production of 40- to 50-inch wide panels.
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| Resolution (L/S) (switchable) |
3.5µm (g+h+i-line),
3µm (i-line) (option) |
| Projection magnification |
1:1 |
| Alignment accuracy |
0.6µm or better |
| Maximum plate size |
1950 x 2250 mm (FX-75S)
2200 x 2500 mm (FX-85S) |
| Mask size |
1220 x 1400mm |
Tact time
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58 sec./plate (FX-75S)
60 sec./plate (FX-85S) Conditions: 4 scans,
g+h+i-line, 30mJ/cm2 |
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Leaflet (215KB)