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| We are totally committed to bolstering global semiconductor/LCD production utilizing our top-notch ultra-precision technologies—the culmination of long-years of dedication to stepper/scanner manufacturing. And we are proud of our role in the advancement of the Information Technology (IT) Society. | |
| Nikon began making semiconductor manufacturing equipment in the 1960s. Ever since our production of Japan’s first domestic stepper in 1980, we have maintained our position as the world’s leading stepper company. Cumulative sales of the Nikon NSR series of IC steppers amount to approximately 7,400 units; and the figure exceeds 8,100 units if the FX-series of LCD steppers are included. We are enthusiastically supporting the global production of semiconductors and LCDs, a vital sector that is undergoing dramatic expansion. | |
To meet the demands for finer circuit patterns, we at the Precision Equipment Company have developed an innovative immersion lithography system. In this system, a liquid featuring a refractive index higher than that of air (pure water, for example) is placed between the projection lens and the wafer, resulting in NA higher than 1.0 that delivers unprecedented resolution. The ArF Immersion Scanner NSR-S609B, Nikon’s model in this field, employs an ArF excimer laser that provided, when it was first introduced, the world’s highest NA of 1.0 or above. The NSR-S609B was followed by the NSR-S610C that extended NA to as high as 1.30, enabling mass production of demanding 45nm devices. In the LCD sector, we released the FX-73S/FX-83S, 7th- and 8th-generation scanners. The FX-83S handles the world's largest plate size (2,200 x 2,400mm-class). We are the first company to address the development of extreme ultraviolet (EUV) lithography, double patterning, high refraction immersion lithography, and other future-generation exposure technologies. |
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