Automated Wafer Measuring System NEXIV VMR-3020 with Wafer Loader NWL860T

With a wafer loading/unloading system, this system measures the whole contents of a wafer carrier automatically.

Dedicated software provides fully automatic carrier-by-carrier measurements
User-friendly GUI facilitates the selection of wafers to be measured
Wafer map facilitates the selection of chips to be measured
Industry-proven NWL860T wafer loader ensures reliable wafer transport
In combination with the VMR-3020 Z120X, it can measure minuscule dimensions on wafers

VMR-3020 + NWL860T
Compatible wafer sizes		ø150mm/200mm (SEMI/JEIDA compliant, silicon)
Standard wafer carriers		Entegris^® 150mm: PA182-60MB, 200mm: 192-80M
Processing speed per carrier (Continuous transfer of 25 wafers)		8 minutes + NEXIV's measurement time
Orientation flat/notch detection		Non-contact, transmitted-type sensor
Wafer transfer/chuck		Vacuum chuck, mechanical transfer
Main unit dimensions (excluding PC rack)		1700 (W) x 960 (D) x 1735 (H) mm (66.9 x 37.8 x 68.3 in.)
Footprint (excluding areas for operation and maintenance)		2750 (W) x 1100 (D) mm (108.3 x 43.3 in.)
Main unit weight		Approx. 370kg (815.7 lb.)
Requirements	Electricity	AC100-240V±10%, 50/60Hz, 11.5A max.
Requirements	Vacuum	–800hPa (–600mmHg), 10NI/min.