Lineup

Flat panel displays render images with breathtaking sharpness. The Nikon lineup includes models that support the world’s largest plate size, bolstering the global manufacturing of crystalline displays.

Resolution (L/S) (switchable) 3.5 µm (g+h+i-line), 3.0 µm (i-line) (option)
Projection magnification 1:1
Overlay ≦ ±0.6 µm
Plate size 2,880 mm × 3,130 mm
Takt time 70 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2
  FX-86SH2 FX-86S2
Resolution (L/S) 2.2 µm (g+h+i-line) 3.0 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.5 µm
Maximum plate size 2,200 mm × 2,500 mm
Takt time 49 sec./plate
Conditions: 2,200 mm × 2,500 mm, 4 scans, g+h+i-line, 30 mJ/cm2
Resolution (L/S) 1.5 µm (i-line)
Projection magnification 1:1
Overlay ≦ ±0.35 µm
Maximum plate size 1,500 mm × 1,850 mm
Takt time 46 sec./plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, 30 mJ/cm2
  FX-67S2 FX-67S
Resolution (L/S) 2.0 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.5 µm
Maximum plate size 1,500 mm × 1,850 mm
Takt time 57 sec./plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2
61 sec./plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2
  FX-66S2 FX-66S
Resolution (L/S) 3.0 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.6 µm
Maximum plate size 1,500 mm × 1,850 mm
Takt time 53 sec./plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2
55 sec./plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2

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