Products archive

FPD Scanners

FX-76S/86S

  FX-76S FX-86S
Resolution (L/S) 3.0 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.6 µm
Maximum plate size 1,950 mm × 2,250 mm 2,200 mm × 2,500 mm
Takt time 56 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2
58 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2

FX-75S/85S

  FX-75S FX-85S
Resolution (L/S) 3.5 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.6 µm
Maximum plate size 1,950 mm × 2,250 mm 2,200 mm × 2,500 mm
Takt time 58 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2
60 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2

FX-55S/65S

  FX-55S FX-65S
Resolution (L/S) (switchable) ≦ 3 µm (i-line), ≦ 3.5 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.6 µm (3σ)
Maximum plate size 1,300 × 1,300 mm 1,500 × 1,850 mm
Takt time 59 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2
67 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2

FX-73S/83S

  FX-73S FX-83S
Resolution (L/S) (switchable) 3.5 µm (g+h+i-line), 3 µm (i-line) (option)
Projection magnification 1:1
Overlay ≦ 0.6 µm
Maximum plate size 1,950 × 2,250 mm 2,200 × 2,500 mm
Takt time 68 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2
72 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2

FX-71S/81S

  FX-71S FX-81S
Resolution (L/S) (switchable) ≦ 3.5 µm (g+h+i-line), 3 µm (i-line) (option)
Projection magnification 1:1
Overlay ≦ 0.6 µm
Maximum plate size 1,950 × 2,250 mm 2,200 × 2,500 mm
Takt time 74 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2
75 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2

FX-53S/63S

  FX-53S FX-63S
Resolution (L/S) (switchable) ≦ 3 µm (i-line), ≦ 3.5 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ 0.6 µm
Maximum plate size 1,300 × 1,300 mm 1,500 × 1,850 mm
Takt time 67 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2
73 sec./plate
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2

FX-21S/22S

  FX-21S FX-22S
Resolution ≦ 2.4 µm (isolated pattern), ≦ 3 µm (L/S)
Projection magnification 1:1
Exposure field 400 × 700 mm 400 × 714 mm
Overlay ≦ 0.6 µm (3σ)
Maximum plate size 800 × 950 mm 920 × 920 mm

FPD Steppers

FX-903N

Resolution (L/S) 1.5 μm
Exposure field 132 mm square
Exposure wavelength i-line (365 nm wavelength)
Projection magnification 1:1.25
Overlay ≦ ±0.30 μm (3σ)
Maximum plate size 730 × 920 mm
Reticle size 6-in. (0.25-in. thickness)
Takt time (30 shots) 65 seconds (50 mJ/cm2)

FX-803M

Resolution (L/S) 3.0 μm
Exposure field 132 mm square
Exposure wavelength g+h-line
Projection magnification 1:1.25
Overlay ≦ ±0.38 μm (3σ)
Maximum plate size 730 × 920 mm
Reticle size 6-in (0.25-in. thickness)
Takt time (30 shots) 65 seconds (40 mJ/cm2)

FX-801M

Resolution ≦ 3 µm (L/S)
Projection magnification 1:1.25
Exposure field 132 mm square
Overlay ≦ 0.4 µm (3σ)
Maximum plate size 730 × 920 mm
Reticle size 6-in. (0.25-in. thickness)
Takt time 89 sec./plate (42 shots) (30 mJ/cm2)

FX-702J

Resolution ≦ 1.5 µm (L/S), ≦ 2.0 µm (C/H)
Projection magnification 1:1
Exposure field 100 mm square to 74.83 x 120 mm (≦ ø141.42 mm)
Reticle size 6-in. (0.25-in. thickness)
Maximum plate size 600 (X) × 720 (Y) mm
Overlay ≦ 0.32 µm (8-point + EGA, |M| + 3σ)
Options Pellicle particle detector, extended reticle library, reticle bar code reader, remote control system (RCS)

FX-701M

Resolution 2.4 µm (isolated pattern), 3 µm (L/S)
Projection magnification 1:1.25
Exposure field 132 mm square to 105.87 (H) × 153.75 (V) mm (≦ ø186.68 mm)
Reticle size 6-in. (0.25-in. thickness)
Maximum plate size 600 (X) × 720 (Y) mm
Overlay 0.5 µm (|M| + 3σ, EGA)
Options Pellicle particle detector, extended reticle library, six-reticle multichanger, bar-code reader, plate edge exposure function, etc.

FX-601F

Resolution ≦ 2.4 µm (isolated pattern), ≦ 3 µm (L/S)
Projection magnification 1:1.25
Exposure field 120 mm square to 98.78 (H) × 138 (V) mm (≦ ø169.71 mm)
Reticle size 6-in. (0.25-in. thickness)
Maximum plate size 550 × 650 mm
Overlay ≦ 0.5 µm (EGA, |M| + 3σ)