The 5th to 8th Generation Exposure Equipment with Multi-Lens System Enabling Enhanced Productivity and Resolution

Nikon Releases New LCD Scanners FX-66S, FX-76S and FX-86S

October 13, 2011

Nikon Corporation (Makoto Kimura, President, Chiyoda-ku, Tokyo) today announced the release of three scanners, FX-66S, FX-76S and FX-86S, which are new exposure equipment for liquid crystal displays (LCDs) with a multi-lens system enabling productivity and performance surpassing existing systems.

Sales Summary

Product name Nikon LCD Scanners FX-66S, FX-76S, FX-86S
Sales launch term October 2011

New Product Overview

FX-66S

With the increasing popularity and outspread of mobile devices such as smartphones, the market is demanding increased production efficiency for liquid crystal display panels and organic LED panels by adopting large plates.
FX-66S is exposure equipment that supports the production of mid-to-small size panels using large plates. Its improved productivity and stable exposure performance enable production of mid-to-small size high definition panels with a high resolution of 3 μm or less (L/S*). When used in combination with the new exposure equipment that is being developed to achieve higher resolution, panels can be produced in volume with even higher definition.

FX-76S and FX-86S

As the popularity of big screen LCD televisions increases, the market is now strongly demanding that large LCD panels achieve both high definition (i.e., full high vision) as well as low costs. FX-76S/86S is Nikon's answer to this market demand.
These LCD scanners support the production of large LCD panels using large plates. With their improved productivity and stable exposure performance, they contribute to volume production of large, high definition LCD panels.

Main Characteristics and Specifications of FX-66S, FX-76S and FX-86S

High Throughput

FX-66S (1300 mm x 1500 mm):
19,000 panels/hr (4-inch panel), 6,600 panels/hr (7-inch panel)
FX-76S (1950 mm x 2250 mm):
514 panels/hr (42-inch wide panel), 385 panels/hr (48-inch wide panel)
FX-86S (2200 mm x 2500 mm):
496 panels/hr (46-inch wide panel), 372 panels/hr (52-inch wide panel)

Improved Exposure Performance

FX-66S/76S/86S adopted the sophisticated calibration feature originally developed for the 10th generation LCD scanner FX-101S, achieving a more stable exposure performance.

Multi-lens System

Nikon's proprietary multi-lens system comprising multiple projection lenses is incorporated.
While ensuring a wide exposure field, a high resolution of 3 μm or less (L/S) is achieved in a more stable manner by introducing a new technology in the lens production method.

Main Specifications

  FX-66S FX-76S FX-86S
Resolution (L/S) 3.0 μm [g+h+i line] 3.0 μm [g+h+i line] 3.0 μm [g+h+i line]
Magnification 1:1 1:1 1:1
Alignment Accuracy 0.6 μm or less 0.6 μm or less 0.6 μm or less
Maximum Plate Size 1500 mm x 1850 mm 1950 mm x 2250 mm 2200 mm x 2500 mm
Tact Time (example) 52 sec/plate
1300 mm x 1500 mm,
4 scans, g+h+i line,
30 mJ/cm2
56 sec/plate
1950 mm x 2250 mm,
4 scans, g+h+i line,
30 mJ/cm2
58 sec/plate
2200 mm x 2500 mm,
4 scans, g+h+i line,
30 mJ/cm2

The information is current as of the date of publication. It is subject to change without notice.