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Jan. 1999
On 1999-02-01, Nikon Corporation introduced a new NEXIV* series CNC video measuring system the "NEXIV VM-1000N".
With a long stage travel of 1,000 (X) × 800 (Y) mm, the VM-1000N is ideally suited for measuring large circuit boards, shadow masks, etching sheets for lead frames, LCD's, mask patterns, and other large workpieces.
Developmental Background
CNC video measuring systems utilize optical measuring and computer-aided image processing technology to measure the sizes and shapes of various workpieces, such as precision instruments and electronic parts, automatically and precisely.
These systems accomplish sophisticated measurements by using a CCD camera to detect the edges of workpieces, then allow various data processing procedures to be applied to these captured images.
Manufacturing is currently undergoing changes in its production systems, calling for greater accuracy in quality control and inspection processes with a reduction in manpower. With the introduction of the "NEXIV VM-250" in January 1995, Nikon has answered this demand with its series of CNC video measuring systems.
The new NEXIV VM-1000N retains the popular features of the existing "NEXIV series", including an excellent optical system, advanced autofocus(AF) and image processing functions, and wide range of software.
In addition, the VM-1000N features a larger X-Y stage travel of 1,000 × 800 mm, making it possible to handle large workpieces such as LCD's, plasma displays, shadow masks, and other large-sized circuit boards.
*"NEXIV" : "NEXIV" is the abbreviation for Nikon EXcellent Intelligent Vision system.
Main Features
In addition to its long 1,000 × 800 mm X-Y stage travel, the VM-1000N has expanded the Z-axis stage travel to 150 mm, the largest in this class.
The maximum workpiece weight has also been increased to 40 kg, making possible the handling of LCD's, printed circuit boards, and other large-sized workpieces. This increased capacity is also convenient when measuring large quantities of small-sized workpieces at one time, saving time and labor.
The VM-1000N comes standard with a 5-step CNC 10 × zoom range from 0.75 to 7.5 × for use at both high and low magnifications.
High magnification is essential for increased accuracy, while low magnification is a must when broader fields of view are required.
For extra-small workpieces, Nikon has two(2) high-magnification models :
"HM Model I" with a zoom range of 1.875 to 18.75 × and
"HM Model II" with a 2.75 to 37.5 × range.
The "NEXIV" system provides optimal illumination environments for individual workpieces by offering six(6) illumination choices as Standard : Episcopic, Diascopic, and TTL (Through The Lens) or External Quadrant (for front, back, left, right) Oblique illumination.
Either Laser AF or TTL Laser AF is optionally available in addition to two(2) types of standard Vision AF.
Select the appropriate autofocus system depending on your application.
Some workpieces contain multiple edges within a given caliper, or their contrast is too low, making edge detection extremely difficult.
The "NEXIV" system graphically profiles the contrasts of the image within the caliper using a multi-gray-level scale, enabling the operator to select any one of a number of edges.
The intelligent search function automatically corrects skew alignment and deviations between the edge probing points of workpieces, eliminating the chance of measurement errors.
"NEXIV" Profiler makes it possible to measure and judge 2-Dimensional profile shapes in a workpiece that cannot be measured in the normal geometric mode.
"NEXIV Bird'sEyeView" allows data to be plotted in a 3-Dimensional format, then analyzed for 3-Dimensional shape and 2-Dimensional cross-section shape.
Besides these programs, Nikon offers a wide variety of software to enhance measurements and improve inspection workflow.
Specifications
| Stage travel (X × Y × Z) | 1,000 × 800 × 150 mm |
|---|---|
| Driving speed | Max. 200 mm / sec. (X, Y), 50 mm / sec. (Z) |
| Minimum readout | 0.1um |
| Maximum work-piece weight | 40 kg |
| Measuring accuracy (X-Y) | U1XY: (2.5 + L / 250) um U2XY: (3.5 + L / 250) um |
| Z-axis guide accuracy | (3 + L / 50) um |
| Camera | B/W or color CCD camera |
| Objective magnification | 5-step 10 × zoom Standard : 0.75 to 7.5 × (5steps), High Magnification Model I : 1.875 to 18.75 ×, High Magnification Model II : 3.75 to 37.5 × |
| Field of view | Standard : 10 × 8 to 1 × 0.8 mm H M Model I : 4 × 3.2 to 0.4 × 0.32 mm H M Model II : 2 × 1.6 to 0.2 × 0.16 mm |
| Auto focus | Standard : Image AF, Laser AF H M Model I : Image AF, Laser AF H M Model II : Image AF, TTL Laser AF, Laser AF |
| Dimensions(W×D×H) and Weight(approx.) |
1,534 × 2,117 × 1,793 mm ; 1,500 kg (Main body) |
| Footprint(D×W) | 2,600 × 2,300 mm |
