Precision Equipment Business
Supporting the evolution of the information society.
Smart devices, computers and large LCD TVs are indispensable to our everyday life today. And integral to such electronics are IC chips and flat panel displays produced in machines called lithography systems. At Nikon, we possess an integrated business — from development and design to manufacturing, sales and after services — creating these essential systems, and supporting the evolution of the information society.
Semiconductor Lithography Business
Semiconductor lithography systems reduce the size of circuit patterns and project them onto silicon wafers. The systems, crucial to IC chip production, require an extreme precision down to 1 nm (one-billionth of a meter), and are regarded as the most precise machines ever developed. Nikon develops and supplies innovative semiconductor lithography systems, addressing the ever-changing requirements for manufacturing IC chips, that are constantly miniaturizing and increasing in intricacy.
ArF Immersion Scanner NSR-S631E
Employing the Streamlign platform, this scanner was developed for high-volume manufacturing of devices at the 7 nm process node (capable of handling multiple patterning). The super-high accuracy of below 2.3 nm Mix-and-Match Overlay (MMO) and extremely high throughput of more than 270 wafers per hour (96 shots) contribute to stable volume manufacturing at cutting-edge production lines.
FPD Lithography Business
FPD lithography systems project circuit patterns onto the surface of glass plates — mother glass for LCD and organic light-emitting diode (OLED) panels. Nikon’s machines range from those employing the unique multi-lens projection optical system for handling large panels, to those for producing the small- and medium-sized panels found in smart devices. Providing such diverse machines to the world’s leading manufacturers, Nikon is the proud top supplier in numbers of these machines in the global market as of the fiscal year ended in March 2016.
FPD Scanner FX-68S
The FX-68S supports the production of leading-edge, high-resolution, small- and medium-sized panels from Gen 6 plates. The scanner method enables improved productivity, excellent resolution (1.5μm) and high overlay accuracy simultaneously.
FPD Scanner FX-101S
Using the multi-lens projection optical system, the FX-101S is capable of handling Gen 10 large glass plates, which measure about 3 x 3 m. Single-scan printing produces six to eight large panels of over 60 inches screen size, making it an excellent solution for mass production.